INFLUENCE OF ROUGHNESS PROFILE ON REFLECTIVITY AND ANGLE-DEPENDENT X-RAY-FLUORESCENCE

被引：17

作者：

DEBOER, DKG ^{[1
]}

LEENAERS, AJG ^{[1
]}

VANDENHOOGENHOF, WW ^{[1
]}

机构：

[1] PHILIPS ANALYT X-RAY BV,7602 EA ALMELO,NETHERLANDS

来源：

JOURNAL DE PHYSIQUE III | 1994年 / 4卷 / 09期

关键词：

D O I：

10.1051/jp3:1994222

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The theory of X-ray scattering from rough interfaces using the second-order distorted-wave Born approximation is reviewed. For specular reflectivity a new expression is given which smoothly connects the Nevot-Croce and Debye-Waller expressions. The shape of the reflectivity curve depends not only on the average roughness, but also on the lateral correlation of the roughness profile. Using the same theory, the several ways in which roughness can influence angle-dependent X-ray fluorescence are evaluated. Finally, possible shapes for the roughness correlation function are discussed.

引用

页码：1559 / 1564

页数：6

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