DETERMINATION OF SURFACE IMPURITY CONCENTRATION PROFILES BY NUCLEAR BACKSCATTERING

被引：57

作者：

ZIEGLER, JF

BAGLIN, JEE

机构：

来源：

关键词：

D O I：

10.1063/1.1660483

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2031 / &

共 43 条

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