MBE GROWTH OF TILTED SUPERLATTICES - ADVANCES AND NOVEL STRUCTURES

被引:17
作者
PETROFF, PM
MILLER, MS
LU, YT
CHALMERS, SA
METIU, H
KROEMER, H
GOSSARD, AC
机构
[1] UNIV CALIF SANTA BARBARA,DEPT COMP & ELECT ENGN,SANTA BARBARA,CA 93106
[2] UNIV CALIF SANTA BARBARA,DEPT CHEM,SANTA BARBARA,CA 93106
基金
美国国家科学基金会;
关键词
D O I
10.1016/0022-0248(91)91001-Q
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The vicinal surface ordering required for the TSL deposition has been studied as a function of temperature and composition for Ga(x)Al1-xAs, GaSb and AlSb surfaces. The interface sharpness observed during the Al-Ga co-deposition and self-organization on a vicinal surface has been modeled using a stochastic kinetics method. The modeling reproduces well the observations. To avoid critical effects of the tilt parameter variations, a novel structure, the serpentine superlattice, has been proposed. This structure has a "build in" two-dimensional confinement and yields uniform luminescence properties over large wafer areas. Finally, the TSL concept has been demonstrated for a novel system, the GaSb-AlSb system.
引用
收藏
页码:360 / 365
页数:6
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