SURFACE SCIENCE STUDIES OF SEMICONDUCTOR GROWTH-PROCESSES

被引：13

作者：

BUHAENKO, DS

FRANCIS, SM

GOULDING, PA

PEMBLE, ME

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584430

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：1688 / 1693

页数：6

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