STRAIN RELAXATION PHENOMENA IN GEXSI1-X/SI STRAINED STRUCTURES

被引:52
作者
HULL, R
BEAN, JC
EAGLESHAM, DJ
BONAR, JM
BUESCHER, C
机构
关键词
D O I
10.1016/0040-6090(89)90437-9
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:117 / 132
页数:16
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