DEEP-LEVEL-NOISE SPECTROSCOPY OF ION-IMPLANTED POLYSILICON THIN-FILMS

被引:7
作者
MADENACH, AJ
WERNER, J
机构
来源
PHYSICAL REVIEW B | 1988年 / 38卷 / 03期
关键词
D O I
10.1103/PhysRevB.38.1958
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
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页码:1958 / 1962
页数:5
相关论文
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