DETERMINATION OF THE CRYSTALLOGRAPHIC ORIENTATION OF CUBIC MEDIA TO HIGH-RESOLUTION USING OPTICAL HARMONIC-GENERATION

被引：42

作者：

BOTTOMLEY, DJ ^{[1
]}

LUPKE, G ^{[1
]}

MIHAYCHUK, JG ^{[1
]}

VANDRIEL, HM ^{[1
]}

机构：

[1] UNIV TORONTO,DEPT PHYS,60 ST GEORGE ST,TORONTO M5S 1A7,ONTARIO,CANADA

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 74卷 / 10期

关键词：

D O I：

10.1063/1.355223

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Using the tensorial characteristic of optical harmonic generation it is shown that the crystallographic orientation of centrosymmetric and noncentrosymmetric cubic media can be determined to within +/-0.1-degrees. As an illustration of the technique the orientation of vicinal GaAs(001) and Si(111) single-crystal wafers is obtained using second- and third-harmonic generation, respectively, with a continuously mode-locked Ti:sapphire laser operating at 775 nm. Intensity measurements were taken as a function of the wafer azimuthal angle and are fit to a truncated Fourier series derived from a phenomenological theory.

引用

页码：6072 / 6078

页数：7

共 12 条

[1] OPTICAL 2ND HARMONIC-GENERATION STUDIES OF THE NATURE OF THE GAAS(100) SURFACE IN AIR [J].

ARMSTRONG, SR ;

HOARE, RD ;

PEMBLE, ME ;

POVEY, IM ;

STAFFORD, A ;

TAYLOR, AG .

JOURNAL OF CRYSTAL GROWTH, 1992, 120 (1-4) :94-97

[2]

Butcher P. N., 1990, ELEMENTS NONLINEAR O

[3] RAMAN MICROPROBE DETERMINATION OF LOCAL CRYSTAL ORIENTATION IN LASER ANNEALED SILICON [J].

HOPKINS, JB ;

FARROW, LA ;

FISANICK, GJ .

APPLIED PHYSICS LETTERS, 1984, 44 (05) :535-537

[4] RAMAN-MICROPROBE STUDY OF STRESS AND CRYSTAL ORIENTATION IN LASER-CRYSTALLIZED SILICON [J].

KOLB, G ;

SALBERT, T ;

ABSTREITER, G .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (05) :3387-3389

[5] SURFACE SYMMETRY RESOLUTION OF NONLINEAR OPTICAL TECHNIQUES [J].

KOOPMANS, B ;

VANDERWOUDE, F ;

SAWATZKY, GA .

PHYSICAL REVIEW B, 1992, 46 (19) :12780-12783

[6] BAND-STRUCTURE CALCULATION OF DISPERSION AND ANISOTROPY IN [--]CHI(3) FOR 3RD-HARMONIC GENERATION IN SI, GE, AND GAAS [J].

MOSS, DJ ;

GHAHRAMANI, E ;

SIPE, JE ;

VANDRIEL, HM .

PHYSICAL REVIEW B, 1990, 41 (03) :1542-1560

[7] CHARACTERIZATION OF SEMICONDUCTOR-MATERIALS BY RAMAN MICROPROBE [J].

NAKASHIMA, S ;

HANGYO, M .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1989, 25 (05) :965-975

[8]

PRESSLEY RJ, 1971, HDB LASERS, pCH18

[9] 2ND HARMONIC-GENERATION STUDIES OF INTERFACIAL STRUCTURE AND DYNAMICS [J].

RICHMOND, GL ;

ROBINSON, JM ;

SHANNON, VL .

PROGRESS IN SURFACE SCIENCE, 1988, 28 (01) :1-70

[10] SURFACE-PROPERTIES PROBED BY 2ND-HARMONIC AND SUM-FREQUENCY GENERATION [J].

SHEN, YR .

NATURE, 1989, 337 (6207) :519-525

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