RAMAN MICROPROBE DETERMINATION OF LOCAL CRYSTAL ORIENTATION IN LASER ANNEALED SILICON

被引：17

作者：

HOPKINS, JB

FARROW, LA

FISANICK, GJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 05期

关键词：

D O I：

10.1063/1.94829

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：535 / 537

页数：3

共 16 条

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