RAMAN MEASUREMENTS OF STRESS IN SILICON-ON-SAPPHIRE DEVICE STRUCTURES

[1] DETERMINATION OF EXISTING STRESS IN SILICON FILMS ON SAPPHIRE SUBSTRATE USING RAMAN-SPECTROSCOPY [J]. SOLID-STATE ELECTRONICS, 1980, 23 (01) : 31 - 33

[2] LATERAL EPITAXY BY SEEDED SOLIDIFICATION FOR GROWTH OF SINGLE-CRYSTAL SI FILMS ON INSULATORS [J]. APPLIED PHYSICS LETTERS, 1981, 38 (05) : 365 - 367

[3] HYNECEK J, 1974, J APPL PHYS, V45, P2631, DOI 10.1063/1.1663642

[4] IPRI AC, 1981, SILICON INTEGRAT A S, V2, P253

[5] MOSFETS ON SILICON PREPARED BY MOVING MELT ZONE RECRYSTALLIZATION OF ENCAPSULATED POLYCRYSTALLINE SILICON ON AN INSULATING SUBSTRATE [J]. ELECTRON DEVICE LETTERS, 1981, 2 (10): : 241 - 243

[6] Novak I. I., 1977, Optics and Spectroscopy, V43, P145

[7] MECHANICAL AND ELECTRICAL PROPERTIES OF EPITAXIAL SILICON FILMS ON SPINEL [J]. SOLID-STATE ELECTRONICS, 1968, 11 (10) : 947 - +

[8] STRESS-ENHANCED CARRIER MOBILITY IN ZONE-MELTING RECRYSTALLIZED POLYCRYSTALLINE SI FILMS ON SIO-2-COATED SUBSTRATES [J]. APPLIED PHYSICS LETTERS, 1982, 40 (04) : 322 - 324

[1] DETERMINATION OF EXISTING STRESS IN SILICON FILMS ON SAPPHIRE SUBSTRATE USING RAMAN-SPECTROSCOPY [J]. SOLID-STATE ELECTRONICS, 1980, 23 (01) : 31 - 33

[2] LATERAL EPITAXY BY SEEDED SOLIDIFICATION FOR GROWTH OF SINGLE-CRYSTAL SI FILMS ON INSULATORS [J]. APPLIED PHYSICS LETTERS, 1981, 38 (05) : 365 - 367

[3] HYNECEK J, 1974, J APPL PHYS, V45, P2631, DOI 10.1063/1.1663642

[4] IPRI AC, 1981, SILICON INTEGRAT A S, V2, P253

[5] MOSFETS ON SILICON PREPARED BY MOVING MELT ZONE RECRYSTALLIZATION OF ENCAPSULATED POLYCRYSTALLINE SILICON ON AN INSULATING SUBSTRATE [J]. ELECTRON DEVICE LETTERS, 1981, 2 (10): : 241 - 243

[6] Novak I. I., 1977, Optics and Spectroscopy, V43, P145

[7] MECHANICAL AND ELECTRICAL PROPERTIES OF EPITAXIAL SILICON FILMS ON SPINEL [J]. SOLID-STATE ELECTRONICS, 1968, 11 (10) : 947 - +

[8] STRESS-ENHANCED CARRIER MOBILITY IN ZONE-MELTING RECRYSTALLIZED POLYCRYSTALLINE SI FILMS ON SIO-2-COATED SUBSTRATES [J]. APPLIED PHYSICS LETTERS, 1982, 40 (04) : 322 - 324