CHARACTERISTICS OF A VIRTUAL IMMERSION LENS SPECTROMETER FOR ELECTRON-BEAM TESTING

被引：3

作者：

ATON, T ^{[1
]}

GARTH, SCJ ^{[1
]}

SACKETT, JN ^{[1
]}

SPICER, DF ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS LTD,BEDFORD MK41 7PA,ENGLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584144

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1953 / 1957

页数：5

共 9 条

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[6] MAGNETIC-FIELD PARALLELIZER FOR 2-PI ELECTRONSPECTROMETER AND ELECTRON-IMAGE MAGNIFIER [J].

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READ, FH .

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MENZEL E, 1985, SOLID STATE TECHNOL, V28, P63

[8] AN IMPROVED MAGNETIC-COLLIMATING SECONDARY-ELECTRON ENERGY FILTER FOR VERY LARGE-SCALE INTEGRATED DIAGNOSTICS [J].

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01) :417-421

[9]

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