MAGNETIC-FIELD EXTRACTION OF SECONDARY ELECTRONS FOR ACCURATE INTEGRATED-CIRCUIT VOLTAGE MEASUREMENT

被引：19

作者：

GARTH, SCJ ^{[1
]}

NIXON, WC ^{[1
]}

SPICER, DF ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS LTD,BEDFORD,ENGLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 01期

关键词：

ELECTRON BEAM TESTING - ELECTRON SPECTROMETERS - INTEGRATED CIRCUIT VOLTAGE MEASUREMENT - MAGNETIC FIELD EXTRACTION - WAVEFORM MEASUREMENT;

D O I：

10.1116/1.583442

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：217 / 220

页数：4

共 9 条

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[4]

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[6]

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[7] MAGNETIC-FIELD PARALLELIZER FOR 2-PI ELECTRONSPECTROMETER AND ELECTRON-IMAGE MAGNIFIER [J].

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READ, FH .

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[8]

MENZEL E, 1981, SCANNING, V5, P351

[9]

RANASINGHE D, 1981, MICROCIRCUIT ENG C L, P522

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