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AN IMPROVED MAGNETIC-COLLIMATING SECONDARY-ELECTRON ENERGY FILTER FOR VERY LARGE-SCALE INTEGRATED DIAGNOSTICS

被引：18
作者：
RICHARDSON, N
MURAY, A
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期
关键词：
D O I：
10.1116/1.583966
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：417 / 421
页数：5
相关论文
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[2]   MAGNETIC-FIELD PARALLELIZER FOR 2-PI ELECTRONSPECTROMETER AND ELECTRON-IMAGE MAGNIFIER [J].
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[3]   DESIGN AND OPTIMIZATION OF MAGNETIC LENSES AND DEFLECTION SYSTEMS FOR ELECTRON-BEAMS [J].
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1146-1150
[4]  
MUNRO E, 1971, THESIS CAMBRIDGE
[5]   ADVANCED DEFLECTION CONCEPT FOR LARGE AREA, HIGH-RESOLUTION E-BEAM LITHOGRAPHY [J].
PFEIFFER, HC ;
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1058-1063
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