SUPERCONDUCTING COMPACT SOURCES FOR LITHOGRAPHY

被引：9

作者：

WILSON, MN

机构：

[1] Oxford Instruments, Ltd., Osney Mead

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1142643

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The production of advanced microchips by x-ray lithography seems likely to become the first large-scale industrial application of synchrotron radiation. Of all the possible x-ray sources, only storage rings have sufficent power to achieve economic throughputs. For this reason, many rings have been and are being built worldwide for lithography. Superconducting rings are preferred because their higher magnetic fields make them more compact.

引用

页码：707 / 712

页数：6

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SMITH, AIC ;

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