FOCUSED ION-BEAM FABRICATION OF SUB-MICRON GOLD STRUCTURES

被引：72

作者：

BLAUNER, PG

RO, JS

BUTT, Y

MELNGAILIS, J

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.584803

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

引用

页码：609 / 617

页数：9

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