ION-BEAM ASSISTED DEPOSITION OF METAL ORGANIC FILMS USING FOCUSED ION-BEAMS

被引：82

作者：

GAMO, K ^{[1
]}

TAKAKURA, N ^{[1
]}

SAMOTO, N ^{[1
]}

SHIMIZU, R ^{[1
]}

NAMBA, S ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 05期

关键词：

D O I：

10.1143/JJAP.23.L293

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L293 / L295

页数：3

共 8 条

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[7] ION-BEAM-INDUCED CONDUCTIVITY IN POLYMER-FILMS [J].

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[8]

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