NEUTRAL TRANSPORT IN HIGH PLASMA-DENSITY REACTORS

被引：44

作者：

KILGORE, MD ^{[1
]}

WU, HM ^{[1
]}

GRAVES, DB ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.587105

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The direct simulation Monte Carlo method is used to study neutral species transport in cylindrical, high plasma-density systems. This technique is well suited for the transition flow regime in which these reactors operate. The ground state neutral density is depleted in the volume of the chamber due to ionization and is enhanced at bounding walls due to ion-electron surface recombination. In addition, electron-neutral and ion-neutral collisions heat the neutrals resulting in further neutral density depletion. The influence of chamber geometry and fractional degree of ionization on neutral density profiles is explored for an electron cyclotron resonance system. Results for an extended source/downstream chamber and for a compact source chamber are compared.

引用

页码：494 / 506

页数：13

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