FABRICATION OF INGAAS RIDGE QUANTUM WIRES BY SELECTIVE MOLECULAR-BEAM EPITAXY AND THEIR CHARACTERIZATION

被引:16
作者
FUJIKURA, H [1 ]
HASAGAWA, H [1 ]
机构
[1] HOKKAIDO UNIV,DEPT ELECT ENGN,SAPPORO,HOKKAIDO 060,JAPAN
关键词
D O I
10.1016/0022-0248(94)00774-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
InGaAs/InAlAs ridge quantum wires were successfully fabricated by selective molecular beam epitaxy (MBE) for the first time. Prior to wire fabrication, detailed data on selective growth characteristics were taken by using test structures. Then, triangular shaped InGaAs ridge quantum wires with a width of 300 Angstrom were fabricated, using the selectivity data. Photoluminescence (PL) measurements detected a strong and narrow peak from the wires which showed a blue shift of 159 meV with respect to the InGaAs band-gap. This value agrees excellently with the calculation.
引用
收藏
页码:327 / 331
页数:5
相关论文
共 9 条
[1]   GROWTH OF STRAINED INGAAS/GAAS QUANTUM-WELLS AND INDEX GUIDED INJECTION-LASERS OVER NONPLANAR SUBSTRATES BY MOLECULAR-BEAM EPITAXY [J].
ARENT, DJ ;
GALEUCHET, YD ;
NILSSON, S ;
MEIER, HP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (02) :145-148
[2]   PATTERNED QUANTUM WELL HETEROSTRUCTURES GROWN BY OMCVD ON NON-PLANAR SUBSTRATES - APPLICATIONS TO EXTREMELY NARROW SQW LASERS [J].
BHAT, R ;
KAPON, E ;
HWANG, DM ;
KOZA, MA ;
YUN, CP .
JOURNAL OF CRYSTAL GROWTH, 1988, 93 (1-4) :850-856
[3]   ONE-DIMENSIONAL ELECTRONIC SYSTEMS IN ULTRAFINE MESA-ETCHED SINGLE AND MULTIPLE QUANTUM WELL WIRES [J].
DEMEL, T ;
HEITMANN, D ;
GRAMBOW, P ;
PLOOG, K .
APPLIED PHYSICS LETTERS, 1988, 53 (22) :2176-2178
[4]   FABRICATION PROCESS AND PROPERTIES OF INGAAS WIRES HAVING SI INTERFACE CONTROL LAYERS FOR REMOVAL OF FERMI LEVEL PINNING [J].
FUJIKURA, H ;
TOMOZAWA, H ;
AKAZAWA, M ;
HASEGAWA, H .
APPLIED SURFACE SCIENCE, 1992, 60-1 :702-709
[5]  
FUJIKURA H, 1994, JPN J APPL PHYS, V33, P912
[6]   CATHODOLUMINESCENCE MEASUREMENT OF AN ORIENTATION DEPENDENT ALUMINUM CONCENTRATION IN ALXGA1-XAS EPILAYERS GROWN BY MOLECULAR-BEAM EPITAXY ON A NONPLANAR SUBSTRATE [J].
HOENK, ME ;
CHEN, HZ ;
YARIV, A ;
MORKOC, H ;
VAHALA, KJ .
APPLIED PHYSICS LETTERS, 1989, 54 (14) :1347-1349
[7]   PATTERNED SUBSTRATE EPITAXY SURFACE SHAPES [J].
JONES, SH ;
SEIDEL, LK ;
LAU, KM ;
HAROLD, M .
JOURNAL OF CRYSTAL GROWTH, 1991, 108 (1-2) :73-88
[8]   LUMINESCENCE CHARACTERISTICS OF QUANTUM WIRES GROWN BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION ON NONPLANAR SUBSTRATES [J].
KAPON, E ;
KASH, K ;
CLAUSEN, EM ;
HWANG, DM ;
COLAS, E .
APPLIED PHYSICS LETTERS, 1992, 60 (04) :477-479
[9]  
OHTUKA M, 1989, J CRYST GROWTH, V95, P55