SPATIAL DOSE UNIFORMITY MONITOR FOR ELECTRICALLY SCANNED ION-BEAM

被引：11

作者：

NATSUAKI, N

OHYU, K

TOKUYAMA, T

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1978年 / 49卷 / 09期

关键词：

D O I：

10.1063/1.1135572

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1300 / 1304

页数：5

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