INFLUENCE OF THE INTER-ATOMIC POTENTIAL AND THE ELASTIC-SCATTERING CROSS-SECTION APPROXIMATION ON THE SPATIAL-DISTRIBUTION OF IMPLANTED IONS

被引：6

作者：

BURENKOV, AF

KOMAROV, FF

TEMKIN, MM

机构：

来源：

PHYSICA STATUS SOLIDI B-BASIC RESEARCH | 1981年 / 105卷 / 01期

关键词：

D O I：

10.1002/pssb.2221050122

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：201 / 212

页数：12

共 27 条

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