DEPTH PROFILES OF HE-3 IONS IMPLANTED INTO SOLIDS AT ENERGIES BETWEEN 20 AND 60 KEV

被引：17

作者：

BOTTIGER, J ^{[1
]}

JENSEN, PS ^{[1
]}

LITTMARK, U ^{[1
]}

机构：

[1] UNIV COPENHAGEN,HC ORSTED INST,PHYS LAB 2,DK-2100 COPENHAGEN 0,DENMARK

来源：

JOURNAL OF APPLIED PHYSICS | 1978年 / 49卷 / 03期

关键词：

D O I：

10.1063/1.324693

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：965 / 970

页数：6

共 23 条

[1] IMPLANTATION PROFILES OF LOW-ENERGY HELIUM IN NIOBIUM AND BLISTERING MECHANISM [J].

BEHRISCH, R ;

BOTTIGER, J ;

ECKSTEIN, W ;

LITTMARK, U ;

ROTH, J ;

SCHERZER, BMU .

APPLIED PHYSICS LETTERS, 1975, 27 (04) :199-201

[2]

Blackburn R, 1966, METALL REV, V11, P159

[3]

BLEWER RS, 1976, J NUCL MATER, V63, P337, DOI 10.1016/0022-3115(76)90348-2

[4] PROTON BACKSCATTERING AS A TECHNIQUE FOR LIGHT ION SURFACE INTERACTION STUDIES IN CTR MATERIALS INVESTIGATIONS [J].

BLEWER, RS .

JOURNAL OF NUCLEAR MATERIALS, 1974, 53 (01) :268-275

[5]

BLEWER RS, 1976, ADV CHEM SER, V158, P262

[6]

BOTTIGER J, UNPUBLISHED

[7]

BOTTIGER J, 1976, ION BEAM SURFACE LAY, P811

[8] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].

CHU, WK ;

MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

THIN SOLID FILMS, 1973, 17 (01) :1-41

[9] NONDESTRUCTIVE ANALYSIS FOR TRACE AMOUNTS OF HYDROGEN [J].

COHEN, BL ;

DEGNAN, JH ;

FINK, CL .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (01) :19-&

[10] MIGRATION OF METAL AND OXYGEN DURING ANODIC FILM FORMATION [J].

DAVIES, JA ;

DOMEIJ, B ;

PRINGLE, JPS ;

BROWN, F .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (07) :675-&

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