DIRECT OBSERVATIONS OF ION-IMPLANTED XENON MARKER LAYERS IN ANODIC BARRIER FILMS ON ALUMINUM

被引：57

作者：

SHIMIZU, K

THOMPSON, GE

WOOD, GC

XU, Y

机构：

来源：

THIN SOLID FILMS | 1982年 / 88卷 / 03期

关键词：

D O I：

10.1016/0040-6090(82)90054-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：255 / 262

页数：8

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[9] BEHAVIOR OF IMPLANTED XENON WHEN USED AS A MARKER DURING THE ANODIC-OXIDATION OF ALUMINUM - EVIDENCE FOR AN EXPLANATION OF A DOSE-DEPENDANT SPLITTING EFFECT
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