SOLID SOLUBILITIES OF GROUP-III AND GROUP-V DOPANTS IN PULSED LASER-ANNEALED SILICON

被引：7

作者：

CHIKAWA, JI

SATO, F

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1980年 / 19卷 / 10期

关键词：

D O I：

10.1143/JJAP.19.L577

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L577 / L580

页数：4

共 12 条

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