PREPARATION OF C-AXIS ORIENTED ZNO THIN-FILMS BY THE PYROSOL PROCESS FOR MICROSENSORS APPLICATIONS

The crystalline orientation of ZnO thin films deposited by an aerosol CVD process is studied with regard to the experimental conditions. The quality of the C-axis oriented growth depended on the substrate temperature, on the deposition rate and also on the hygrometric degree of the carrier gas. The quality of the gold sublayer influenced also the quality of the ZnO textured growth. Under a dry gas mixture N2-O2 at 495-degrees-C and with a deposition rate of 35 angstrom/mn, the texture ratio was less than - 3.5 and the misorientation of the 002 line was less than 1.6-degrees.