SILICON-NITRIDE FILMS ON SILICON FOR OPTICAL-WAVEGUIDES

被引：132

作者：

STUTIUS, W ^{[1
]}

STREIFER, W ^{[1
]}

机构：

[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304

来源：

APPLIED OPTICS | 1977年 / 16卷 / 12期

关键词：

D O I：

10.1364/AO.16.003218

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：3218 / 3222

页数：5

共 11 条

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