GLOW-DISCHARGE REMOVAL OF CODEPOSITED CARBON-FILMS IN GRAPHITE-LINED TOKAMAK REACTORS

被引：38

作者：

HSU, WL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576227

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1047 / 1051

页数：5

共 19 条

[1]

ANGUS JC, 1986, PLASMA DEPOSITED THI

[2] RELATION OF POLYMER STRUCTURE TO PLASMA-ETCHING BEHAVIOR - ROLE OF ATOMIC FLUORINE [J].

CAIN, SR ;

EGITTO, FD ;

EMMI, F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1578-1584

[3] MEASUREMENT AND MODIFICATION OF FIRST-WALL SURFACE COMPOSITION IN OAK-RIDGE TOKAMAK (ORMAK) [J].

CLAUSING, RE ;

EMERSON, LC ;

HEATHERLY, L ;

COLCHIN, RJ ;

TWICHELL, JC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :437-442

[4]

COAD JP, 1987, 14TH P EUR C CON 2 D, V11

[5]

DYLLA HF, 1988, PPPL2523 PRINC PLASM

[6]

DYLLA HF, COMMUNICATION

[7]

DYLLA HF, 1988, IN PRESS J NUCL MATE

[8] CARBON DEPOSITION IN THE GAPS BETWEEN TILES - DATA FROM THE TOKAMAK FUSION TEST REACTOR AND LABORATORY SIMULATION STUDIES [J].

HSU, WL ;

MILLS, BE ;

EHRHARDT, AB ;

SUN, YC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :1065-1069

[9] CHEMICAL EROSION OF GRAPHITE BY HYDROGEN IMPACT - A SUMMARY OF THE DATABASE RELEVANT TO DIAMOND FILM GROWTH [J].

HSU, WL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1803-1811

[10] PUMPING OF HYDROGEN DURING PLASMA GRAPHITE INTERACTION [J].

HSU, WL ;

CAUSEY, RA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2768-2772

← 1 2 →