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SOURCES OF SURFACE CONTAMINATION AFFECTING ELECTRICAL CHARACTERISTICS OF SEMICONDUCTORS

被引：21
作者：
SLUSSER, GJ
MACDOWELL, L
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574539
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1649 / 1651
页数：3
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