QUANTITATIVE-ANALYSIS OF INTERFACIAL IMPURITIES USING SECONDARY-ION MASS-SPECTROMETRY

被引：35

作者：

WILLIAMS, P

BAKER, JE

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 10期

关键词：

D O I：

10.1063/1.91343

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：842 / 845

页数：4

共 12 条

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