学术探索
学术期刊
新闻热点
数据分析
智能评审
立即登录
SPUTTERING OF PTSI
被引:141
作者
:
LIAU, ZL
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
LIAU, ZL
[
1
]
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
MAYER, JW
[
1
]
BROWN, WL
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BROWN, WL
[
1
]
POATE, JM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
POATE, JM
[
1
]
机构
:
[1]
BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源
:
JOURNAL OF APPLIED PHYSICS
|
1978年
/ 49卷
/ 10期
关键词
:
D O I
:
10.1063/1.324431
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:5295 / 5305
页数:11
相关论文
共 29 条
[1]
AUGUSTYNIAK WM, UNPUBLISHED
[2]
Brice D. K., 1970, Radiation Effects, V6, P77, DOI 10.1080/00337577008235048
[3]
BRICE DK, COMMUNICATION
[4]
BROWN WL, 1977, 7 P INT C AT COLL SO
[5]
PT2SI AND PTSI FORMATION WITH HIGH-PURITY PT THIN-FILMS
CANALI, C
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
CANALI, C
CATELLANI, C
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
CATELLANI, C
PRUDENZIATI, M
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
PRUDENZIATI, M
WADLIN, WH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
WADLIN, WH
EVANS, CA
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
EVANS, CA
[J].
APPLIED PHYSICS LETTERS,
1977,
31
(01)
: 43
-
45
[6]
SURFACE ENRICHMENT OF COPPER DUE TO KEV XE SPUTTERING OF AN AL-CU MIXTURE
CHU, WK
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
CHU, WK
HOWARD, JK
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
HOWARD, JK
LEVER, RF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
LEVER, RF
[J].
JOURNAL OF APPLIED PHYSICS,
1976,
47
(10)
: 4500
-
4503
[7]
PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS
CHU, WK
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
CHU, WK
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
MAYER, JW
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
NICOLET, MA
BUCK, TM
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
BUCK, TM
AMSEL, G
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
AMSEL, G
EISEN, F
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
EISEN, F
[J].
THIN SOLID FILMS,
1973,
17
(01)
: 1
-
41
[8]
FABER W, 1976, NUCL INSTRUM METHODS, V132, P351
[9]
THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING
GILLAM, E
论文数:
0
引用数:
0
h-index:
0
GILLAM, E
[J].
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS,
1959,
11
(1-2)
: 55
-
&
[10]
MODEL FOR SURFACE-LAYER COMPOSITION CHANGES IN SPUTTERED ALLOYS AND COMPOUNDS
HAFF, PK
论文数:
0
引用数:
0
h-index:
0
机构:
YALE UNIV,AW WRIGHT NUCL STRUCT LAB,NEW HAVEN,CT 06520
YALE UNIV,AW WRIGHT NUCL STRUCT LAB,NEW HAVEN,CT 06520
HAFF, PK
[J].
APPLIED PHYSICS LETTERS,
1977,
31
(04)
: 259
-
260
←
1
2
3
→
共 29 条
[1]
AUGUSTYNIAK WM, UNPUBLISHED
[2]
Brice D. K., 1970, Radiation Effects, V6, P77, DOI 10.1080/00337577008235048
[3]
BRICE DK, COMMUNICATION
[4]
BROWN WL, 1977, 7 P INT C AT COLL SO
[5]
PT2SI AND PTSI FORMATION WITH HIGH-PURITY PT THIN-FILMS
CANALI, C
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
CANALI, C
CATELLANI, C
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
CATELLANI, C
PRUDENZIATI, M
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
PRUDENZIATI, M
WADLIN, WH
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
WADLIN, WH
EVANS, CA
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MODENA,INST FIS,I-41100 MODENA,ITALY
EVANS, CA
[J].
APPLIED PHYSICS LETTERS,
1977,
31
(01)
: 43
-
45
[6]
SURFACE ENRICHMENT OF COPPER DUE TO KEV XE SPUTTERING OF AN AL-CU MIXTURE
CHU, WK
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
CHU, WK
HOWARD, JK
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
HOWARD, JK
LEVER, RF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533
LEVER, RF
[J].
JOURNAL OF APPLIED PHYSICS,
1976,
47
(10)
: 4500
-
4503
[7]
PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS
CHU, WK
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
CHU, WK
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
MAYER, JW
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
NICOLET, MA
BUCK, TM
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
BUCK, TM
AMSEL, G
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
AMSEL, G
EISEN, F
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
EISEN, F
[J].
THIN SOLID FILMS,
1973,
17
(01)
: 1
-
41
[8]
FABER W, 1976, NUCL INSTRUM METHODS, V132, P351
[9]
THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING
GILLAM, E
论文数:
0
引用数:
0
h-index:
0
GILLAM, E
[J].
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS,
1959,
11
(1-2)
: 55
-
&
[10]
MODEL FOR SURFACE-LAYER COMPOSITION CHANGES IN SPUTTERED ALLOYS AND COMPOUNDS
HAFF, PK
论文数:
0
引用数:
0
h-index:
0
机构:
YALE UNIV,AW WRIGHT NUCL STRUCT LAB,NEW HAVEN,CT 06520
YALE UNIV,AW WRIGHT NUCL STRUCT LAB,NEW HAVEN,CT 06520
HAFF, PK
[J].
APPLIED PHYSICS LETTERS,
1977,
31
(04)
: 259
-
260
←
1
2
3
→