SPUTTERING OF PTSI

被引：141

作者：

LIAU, ZL ^{[1
]}

MAYER, JW ^{[1
]}

BROWN, WL ^{[1
]}

POATE, JM ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED PHYSICS | 1978年 / 49卷 / 10期

关键词：

D O I：

10.1063/1.324431

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：5295 / 5305

页数：11

相关论文

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