INFLUENCE OF SURFACE ABSORPTION CHARACTERISTICS ON REACTIVELY SPUTTERED FILMS GROWN IN BIASED AND UNBIASED MODES

被引：58

作者：

WINTERS, HF

KAY, E

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 03期

关键词：

D O I：

10.1063/1.1661282

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：794 / &

相关论文

共 30 条

[1] STRESS AND RESISTIVITY CONTROL IN SPUTTERED MOLYBDENUM FILMS AND COMPARISON WITH SPUTTERED GOLD
BLACHMAN, AG
[J]. METALLURGICAL TRANSACTIONS, 1971, 2 (03): : 699 - &
[2] BOND GC, 1962, CATALYSIS METALS, P66
[3] CHRISTENSEN O, 1970, SOLID STATE TECHNOL, V13, P39
[4] LOW-TEMPERATURE CHEMISORPTION .2. FLASH DESORPTION OF CARBON MONOXIDE
EHRLICH, G
[J]. JOURNAL OF CHEMICAL PHYSICS, 1961, 34 (01) : 39 - &
[5] EXPERIMENTAL EVIDENCE FOR TUNNEL-RESONANCE EFFECTS IN FIELD ELECTRON EMISSION
ERMRICH, W
VANOOSTR.A
[J]. SOLID STATE COMMUNICATIONS, 1967, 5 (06) : 471 - &
[6] PROPERTIES OF SUPERCONDUCTING NIOBIUM FILMS MADE BY ASYMMETRIC AC SPUTTERING
FRERICHS, R
KIRCHER, CJ
[J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (12) : 3541 - &
[7] SUPERCONDUCTIVE FILMS MADE BY PROTECTED SPUTTERING OF TANTALUM OR NIOBIUM
FRERICHS, R
[J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) : 1898 - &
[8] EFFECTS OF NITROGEN METHANE + OXYGEN ON STRUCTURE + ELECTRICAL PROPERTIES OF THIN TANTALUM FILMS
GERSTENBERG, D
CALBICK, CJ
[J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) : 402 - &
[9] GLANG R, 1965, 3 T INT VAC C 3, V2, P643
[10] HEURLE FM, 1966, T AIME, V236, P321