INFLUENCE OF SURFACE ABSORPTION CHARACTERISTICS ON REACTIVELY SPUTTERED FILMS GROWN IN BIASED AND UNBIASED MODES

被引：58

作者：

WINTERS, HF

KAY, E

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 03期

关键词：

D O I：

10.1063/1.1661282

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：794 / &

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