STRUCTURAL CHARACTERIZATION OF CHROMIUM CARBIDE COATINGS DEPOSITED AT LOW-TEMPERATURE BY LOW-PRESSURE CHEMICAL VAPOR DECOMPOSITION USING DICUMENE CHROMIUM

被引：21

作者：

MAURY, F ^{[1
]}

OQUAB, D ^{[1
]}

MANSE, JC ^{[1
]}

MORANCHO, R ^{[1
]}

NOWAK, JF ^{[1
]}

GAUTHIER, JP ^{[1
]}

机构：

[1] UNIREC,CTR RECH UNIEUX,F-42702 FIRMINY,FRANCE

来源：

SURFACE & COATINGS TECHNOLOGY | 1990年 / 41卷 / 01期

关键词：

D O I：

10.1016/0257-8972(90)90129-Z

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The growth of chromium carbide coatings by pyrolysis of dicumene chromium in a hot-wall low pressure chemical vapour deposition reactor has been investigated between 300 and 550 °C. Amorphous chromium carbide films were obtained in the low temperature range 300 - 500 °C whereas a textured crystalline Cr7C3 phase was grown above 500 °C. The total carbon content was independent of the deposition temperature and amounted to a carbon excess of about 30% compared with the Cr7C3 stoichiometry. Electron spectroscopy for chemical analysis of both amorphous and crystalline coatings confirms the presence of this carbon excess since about 30% - 40% of free carbon was found. A heterogeneous structural model composed of the Cr7C3 phase and free carbon is proposed both for crystalline and amorphous coatings. © 1990.

引用

页码：51 / 61

页数：11

共 29 条

[1] CHROMIUM DEPOSITION FROM DICUMENE-CHROMIUM TO FORM METAL-SEMICONDUCTOR DEVICES [J].