THE ACCUMULATION-MODE FIELD-EFFECT TRANSISTOR - A NEW ULTRALOW ON-RESISTANCE MOSFET

被引:22
作者
BALIGA, BJ
SYAU, TY
VENKATRAMAN, P
机构
[1] Electrical and Computer Engineering Department, North Carolina State University, Raleigh
关键词
D O I
10.1109/55.192780
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An ultralow specific on-resistance, vertical channel, power MOSFET structure, based upon current conduction via an accumulation layer formed on the surface of a trench (UMOS) gate structure, is described. Two-dimensional numerical simulations and experimental results have been obtained demonstrating that a specific on-resistance approaching 100-mu-OMEGA . cm2 can be obtained for a silicon device capable of blocking 25 V.
引用
收藏
页码:427 / 429
页数:3
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