AN ULTRA-LOW ON-RESISTANCE POWER MOSFET FABRICATED BY USING A FULLY SELF-ALIGNED PROCESS

被引:35
作者
UEDA, D
TAKAGI, H
KANO, G
机构
关键词
D O I
10.1109/T-ED.1987.23017
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:926 / 930
页数:5
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