REFRACTORY SILICIDES FOR INTEGRATED-CIRCUITS

被引：574

作者：

MURARKA, SP

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 04期

关键词：

D O I：

10.1116/1.570560

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：775 / 792

页数：18

共 72 条

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