ORDERED STRUCTURE AND ION MIGRATION IN SILICON DIOXIDE FILMS

被引:39
作者
SUGANO, T
HOH, K
KUDO, K
HISHINUMA, N
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10.1143/JJAP.7.715
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O59 [应用物理学];
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页码:715 / +
页数:1
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共 34 条
[1]  
BARROW GM, 1962, INTRODUCTION MOLECUL
[2]  
BELL T, 1962, PHYS CHEM GLASSES-B, V3, P141
[3]  
BOWEN HJM, 1963, RADIOACTIVATION ANAL, P221
[4]  
COULSON CA, 1961, VALENCE, P189
[5]  
EDAGAWA H, 1963, JPN J APPL PHYS, V2, P765
[6]   SURFACE PROTECTION AND SELECTIVE MASKING DURING DIFFUSION IN SILICON [J].
FROSCH, CJ ;
DERICK, L .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1957, 104 (09) :547-552
[8]   PROTON AND SODIUM TRANSPORT IN SIO2 FILMS [J].
HOFSTEIN, SR .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1967, ED14 (11) :749-+
[9]   STABILIZATION OF MOS DEVICES [J].
HOFSTEIN, SR .
SOLID-STATE ELECTRONICS, 1967, 10 (07) :657-+
[10]   GAS PERMEATION STUDY AND IMPERFECTION DETECTION OF THERMALLY GROWN AND DEPOSITED THIN SILICON DIOXIDE FILMS [J].
ING, SW ;
MORRISON, RE ;
SANDOR, JE .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (03) :221-226