MODIFICATION OF AMORPHOUS HYDROGENATED SILICON BY CO-SPUTTERED ALUMINUM

被引：23

作者：

THOMPSON, MG

REINHARD, DK

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1980年 / 37卷 / 03期

关键词：

D O I：

10.1016/0022-3093(80)90067-8

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：325 / 333

页数：9

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[9] DOPING OF AMORPHOUS SILICON BY ALKALI-ION IMPLANTATIONS [J].

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[10]

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