MECHANICAL AND ELECTRICAL-PROPERTIES OF THE DOUBLE-LAYER FILM SYSTEM GEO2-SI3N4 ON GE

被引：7

作者：

GOROKHOV, EB

KOSULINA, IG

POKROVSKAYA, SV

NEIZVESTNY, IG

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1987年 / 101卷 / 02期

关键词：

D O I：

10.1002/pssa.2211010217

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：451 / 462

页数：12

共 24 条

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[7]

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[8]

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ISOMAE, S ;

NANBA, M ;

TAMAKI, Y ;

MAKI, M .

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