CREEP CURVE OF SILICON WAFERS

被引:27
作者
ISOMAE, S [1 ]
NANBA, M [1 ]
TAMAKI, Y [1 ]
MAKI, M [1 ]
机构
[1] HITACHI LTD,CENT RES LAB,TOKYO 185,JAPAN
关键词
D O I
10.1063/1.89261
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:564 / 566
页数:3
相关论文
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