CROSS-SECTION MEASUREMENTS FOR ELECTRON-IMPACT DISSOCIATION OF CHF3 INTO NEUTRAL AND IONIC RADICALS

被引：58

作者：

GOTO, M

NAKAMURA, K

TOYODA, H

SUGAI, H

机构：

[1] Department of Electrical Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 6A期

关键词：

TRIFLUOROMETHANE; DISSOCIATION CROSS SECTION; NEUTRAL RADICAL; ELECTRON IMPACT; IONIZATION CROSS SECTION;

D O I：

10.1143/JJAP.33.3602

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Absolute cross sections for electron-impact dissociation of CHF3 from the threshold to 200 eV are presented for formation of the neutral radicals CF3, CHF2, CF2, CHF and CF. This measurement was accomplished by appearance mass spectrometry in a dual electron beam device. The threshold energies for neutral dissociation into CF3, CHF2 and CF were measured to be 11.0, 13.0 and 19.5 eV, respectively. The surface loss probability of each radical and the electron-impact nitrogen dissociation were measured to calibrate the relative dissociation cross sections of CHF3. The branching ratio for dissociation at 150 eV is CF3:CF2:CF:CHF2:CHF=27:5:10:2:1. In addition to the neutral dissociation, the cross section for dissociative ionization of CHF3 was extensively measured for formation of CF3+, CHF2+, CF2+, CHF+, CF+, CH+ and F+.

引用

页码：3602 / 3607

页数：6

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