CROSS-SECTION MEASUREMENTS FOR ELECTRON-IMPACT DISSOCIATION OF CHF3 INTO NEUTRAL AND IONIC RADICALS

被引:58
作者
GOTO, M
NAKAMURA, K
TOYODA, H
SUGAI, H
机构
[1] Department of Electrical Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 6A期
关键词
TRIFLUOROMETHANE; DISSOCIATION CROSS SECTION; NEUTRAL RADICAL; ELECTRON IMPACT; IONIZATION CROSS SECTION;
D O I
10.1143/JJAP.33.3602
中图分类号
O59 [应用物理学];
学科分类号
摘要
Absolute cross sections for electron-impact dissociation of CHF3 from the threshold to 200 eV are presented for formation of the neutral radicals CF3, CHF2, CF2, CHF and CF. This measurement was accomplished by appearance mass spectrometry in a dual electron beam device. The threshold energies for neutral dissociation into CF3, CHF2 and CF were measured to be 11.0, 13.0 and 19.5 eV, respectively. The surface loss probability of each radical and the electron-impact nitrogen dissociation were measured to calibrate the relative dissociation cross sections of CHF3. The branching ratio for dissociation at 150 eV is CF3:CF2:CF:CHF2:CHF=27:5:10:2:1. In addition to the neutral dissociation, the cross section for dissociative ionization of CHF3 was extensively measured for formation of CF3+, CHF2+, CF2+, CHF+, CF+, CH+ and F+.
引用
收藏
页码:3602 / 3607
页数:6
相关论文
共 14 条
[1]   ELECTRON-IMPACT IONIZATION AND DISSOCIATIVE IONIZATION OF THE CD3 AND CD2 FREE-RADICALS [J].
BAIOCCHI, FA ;
WETZEL, RC ;
FREUND, RS .
PHYSICAL REVIEW LETTERS, 1984, 53 (08) :771-774
[2]   TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J].
CHATHAM, H ;
HILS, D ;
ROBERTSON, R ;
GALLAGHER, A .
JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) :1770-1777
[3]   ELECTRON-IMPACT IONIZATION CROSS-SECTIONS OF THE SIF3 FREE-RADICAL [J].
HAYES, TR ;
SHUL, RJ ;
BAIOCCHI, FA ;
WETZEL, RC ;
FREUND, RS .
JOURNAL OF CHEMICAL PHYSICS, 1988, 89 (07) :4035-4041
[4]   ABSOLUTE PARTIAL AND TOTAL ELECTRON-IMPACT-IONIZATION CROSS-SECTIONS FOR CF4 FROM THRESHOLD UP TO 500 EV [J].
MA, C ;
BRUCE, MR ;
BONHAM, RA .
PHYSICAL REVIEW A, 1991, 44 (05) :2921-2934
[5]   ELECTRON-IMPACT DISSOCIATION OF METHANE INTO CH3 AND CH2 RADICALS .1. RELATIVE CROSS-SECTIONS [J].
NAKANO, T ;
TOYODA, H ;
SUGAI, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11A) :2908-2911
[6]   ELECTRON-IMPACT DISSOCIATION OF METHANE INTO CH3 AND CH2 RADICALS .2. ABSOLUTE CROSS-SECTIONS [J].
NAKANO, T ;
TOYODA, H ;
SUGAI, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11A) :2912-2915
[7]   PARTIAL CROSS-SECTIONS FOR ELECTRON-IMPACT DISSOCIATION OF CF-4 INTO NEUTRAL RADICALS [J].
NAKANO, T ;
SUGAI, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (9A) :2919-2924
[8]   CROSS-SECTION MEASUREMENTS FOR ELECTRON-IMPACT DISSOCIATION OF SIF(4) INTO NEUTRAL RADICALS [J].
NAKANO, T ;
SUGAI, H .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (11) :1909-1915
[9]   PARTIAL CROSS-SECTIONS FOR DISSOCIATIVE IONIZATION OF FLUORINATED COMPOUNDS BY ELECTRON-IMPACT [J].
POLL, HU ;
MEICHSNER, J .
CONTRIBUTIONS TO PLASMA PHYSICS, 1987, 27 (05) :359-372
[10]   TOTAL CROSS SECTIONS FOR IONIZATION AND ATTACHMENT IN GASES BY ELECTRON IMPACT .I. POSITIVE IONIZATION [J].
RAPP, D ;
ENGLANDE.P .
JOURNAL OF CHEMICAL PHYSICS, 1965, 43 (05) :1464-&