DC MAGNETRON SPUTTERING OF YBA2CU3O7-Y THIN-FILMS

被引：6

作者：

GIERLOWSKI, P

KULA, W

JUNG, G

KONOPKA, A

KONOPKA, J

SOBOLEWSKI, R

STASKIEWICZ, J

机构：

来源：

PHYSICA SCRIPTA | 1989年 / 39卷 / 03期

关键词：

D O I：

10.1088/0031-8949/39/3/018

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：360 / 362

页数：3

共 9 条

[1]

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[2] INSITU RESISTANCE OF Y1BA2CU3OX FILMS DURING ANNEAL [J].

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[3] SUPERCONDUCTING Y-BA-CU-O OXIDE-FILMS BY SPUTTERING [J].

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LIOU, SH ;

KWO, J ;

DAVIDSON, BA .

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[4] SIMPLE PATTERNING OF SPRAY-DEPOSITED Y-BA-CU-O FILMS [J].

KULA, W ;

SOBOLEWSKI, R ;

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SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 1988, 1 (03) :145-147

[5] PREPARATION OF Y-BA-CU-O THIN-FILMS ON MGO BY DC MAGNETRON SPUTTERING FROM A STOICHIOMETRIC Y1BA2CU3O7-DELTA TARGET [J].

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RIPPERT, ED ;

JIN, BY ;

SONG, SN ;

HWU, SJ ;

POEPPELMEIER, K ;

KETTERSON, JB .

APPLIED PHYSICS LETTERS, 1987, 51 (15) :1194-1196

[6] INSITU PREPARATION OF Y-BA-CU-O SUPERCONDUCTING THIN-FILMS BY MAGNETRON SPUTTERING [J].

LI, HC ;

LINKER, G ;

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SMITHEY, R ;

GEERK, J .

APPLIED PHYSICS LETTERS, 1988, 52 (13) :1098-1100

[7] SYNTHESIS OF Y-BA-CU-O THIN-FILMS ON SAPPHIRE SUBSTRATES BY RF MAGNETRON SPUTTERING [J].

MICHIKAMI, O ;

ASANO, H ;

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KUBO, S ;

TANABE, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (07) :L1199-L1201

[8] SUPERCONDUCTIVITY AND RESPUTTERING EFFECTS IN RF-SPUTTERED YBA2CU3O7-X THIN-FILMS [J].

SHAH, SI ;

CARCIA, PF .

APPLIED PHYSICS LETTERS, 1987, 51 (25) :2146-2148

[9] PLANAR MAGNETRON SPUTTERING [J].

WAITS, RK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :179-187

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