LATTICE DILATATION OF BORON IN SILICON

被引:5
作者
STONEHAM, AM
机构
[1] Theoretical Physics Division, AERE, Harwell
关键词
D O I
10.1016/0375-9601(79)90326-8
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Recent data on laser-annealed, boron-implanted silicon are analysed, and the results compared with earlier experiments and simple theory. Each substitutional boron decreases the total volume by about 90% of the volume per silicon atom in the perfect crystal. © 1979.
引用
收藏
页码:55 / 56
页数:2
相关论文
共 9 条
[1]  
BUBLIK VT, 1969, FIZ TVERD TELA+, V10, P2247
[2]   LATTICE-PARAMETER STUDY OF SILICON UNIFORMLY DOPED WITH BORON AND PHOSPHORUS [J].
CELOTTI, G ;
NOBILI, D ;
OSTOJA, P .
JOURNAL OF MATERIALS SCIENCE, 1974, 9 (05) :821-828
[4]   DENSITOMETRIC AND ELECTRICAL INVESTIGATION OF BORON IN SILICON [J].
HORN, FH .
PHYSICAL REVIEW, 1955, 97 (06) :1521-1525
[5]  
Keyes R. W., 1968, SOLID STATE PHYS, V20, P37, DOI DOI 10.1016/S0081-1947(08)60217-9
[6]   UNIDIRECTIONAL CONTRACTION IN BORON-IMPLANTED LASER-ANNEALED SILICON [J].
LARSON, BC ;
WHITE, CW ;
APPLETON, BR .
APPLIED PHYSICS LETTERS, 1978, 32 (12) :801-803
[7]  
Stoneham A. M., 1975, THEORY DEFECTS SOLID
[8]   DIMENSION CHANGES IN A SOLID CONTAINING ANISOTROPIC DEFECTS [J].
STONEHAM, AM .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1973, 6 (02) :223-228
[9]  
TEMKIN DE, 1970, SOV PHYS-SOLID STATE, V11, P1614