DIRECT EVIDENCE FOR THE AMORPHOUS-SILICON PHASE IN VISIBLE PHOTOLUMINESCENT POROUS SILICON

被引:151
作者
PEREZ, JM [1 ]
VILLALOBOS, J [1 ]
MCNEILL, P [1 ]
PRASAD, J [1 ]
CHEEK, R [1 ]
KELBER, J [1 ]
ESTRERA, JP [1 ]
STEVENS, PD [1 ]
GLOSSER, R [1 ]
机构
[1] UNIV TEXAS,CTR APPL OPT & PHYS PROGRAMS,RICHARDSON,TX 75083
关键词
D O I
10.1063/1.107837
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on micro-Raman spectroscopy studies of porous silicon which show an amorphous silicon Raman line at 480 R cm-1 from regions that emit visible photoluminescence. A Raman line corresponding to microcrystalline silicon at 510 R cm-1 is also observed. X-ray photoelectron spectroscopy data is presented which shows a high silicon-dioxide content in porous silicon consistent with an amorphous silicon phase.
引用
收藏
页码:563 / 565
页数:3
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