IMPROVEMENT OF THE PHOTOELECTRIC PROPERTIES OF AMORPHOUS SICX-H BY USING DISILYLMETHANE AS A FEEDING GAS

被引：47

作者：

BEYER, W

HAGER, R

SCHMIDBAUR, H

WINTERLING, G

机构：

[1] TECH UNIV MUNICH, INST ANORGAN CHEM, D-8046 GARCHING, FED REP GER

[2] MESSERSCHMITT BOLKOW BLOHM GMBH, D-8000 MUNCHEN 80, FED REP GER

来源：

关键词：

D O I：

10.1063/1.101412

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1666 / 1668

页数：3

共 20 条

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