DEVELOPMENT OF FOCUSED ION-BEAM SYSTEMS

被引：3

作者：

AIHARA, R ^{[1
]}

SAWARAGI, H ^{[1
]}

THOMPSON, B ^{[1
]}

SHEARER, MH ^{[1
]}

机构：

[1] JEOL USA INC,PEABODY,MA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90172-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：212 / 217

页数：6

共 20 条

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