COMPOSITIONAL DISORDERING AND VERY-FINE LATERAL DEFINITION OF GAAS-ALGAAS SUPERLATTICES BY FOCUSED GA ION-BEAMS

被引：19

作者：

HIRAYAMA, Y

SUZUKI, Y

OKAMOTO, H

机构：

来源：

SURFACE SCIENCE | 1986年 / 174卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(86)90393-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：98 / 104

页数：7

共 9 条

[1] DISORDER OF AN ALAS-GAAS SUPER-LATTICE BY SILICON IMPLANTATION
COLEMAN, JJ
DAPKUS, PD
KIRKPATRICK, CG
CAMRAS, MD
HOLONYAK, N
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (10) : 904 - 906
[2] ION-SPECIES DEPENDENCE OF INTERDIFFUSION IN ION-IMPLANTED GAAS-ALAS SUPERLATTICES
HIRAYAMA, Y
SUZUKI, Y
OKAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1985, 24 (11): : 1498 - 1502
[3] INTERDIFFUSION OF AL AND GA IN SI-IMPLANTED GAAS-ALAS SUPERLATTICES
HIRAYAMA, Y
HORIKOSHI, Y
OKAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (12): : 1568 - 1572
[4] COMPOSITIONAL DISORDERING OF GAAS-ALXGA1-XAS SUPERLATTICE BY GA FOCUSED ION-BEAM IMPLANTATION AND ITS APPLICATION TO SUB-MICRON STRUCTURE FABRICATION
HIRAYAMA, Y
SUZUKI, Y
TARUCHA, S
OKAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1985, 24 (07): : L516 - L518
[5] ZN DIFFUSION AND DISORDERING OF AN ALAS-GAAS SUPER-LATTICE ALONG ITS LAYERS
KIRCHOEFER, SW
HOLONYAK, N
COLEMAN, JJ
DAPKUS, PD
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (01) : 766 - 768
[6] LAIDIG WD, 1981, APPL PHYS LETT, V38, P776, DOI 10.1063/1.92159
[7] DIFFUSION AND INTERDIFFUSION IN ZN-DISORDERED ALAS-GAAS SUPER-LATTICES
LEE, JW
LAIDIG, WD
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1984, 13 (01) : 147 - 165
[8] STUDY ON ZN DIFFUSION IN GAAS AND ALXGA1-XAS(X LESS-THAN-OR-EQUAL-TO 0.4) AT TEMPERATURES FROM 726-DEGREES-C TO 566-DEGREES-C
MATSUMOTO, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (05): : 829 - 835
[9] DISORDERING OF GA1-XALXAS-GAAS QUANTUM WELL STRUCTURES BY DONOR SULFUR DIFFUSION
RAO, EVK
THIBIERGE, H
BRILLOUET, F
ALEXANDRE, F
AZOULAY, R
[J]. APPLIED PHYSICS LETTERS, 1985, 46 (09) : 867 - 869

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