ION-SPECIES DEPENDENCE OF INTERDIFFUSION IN ION-IMPLANTED GAAS-ALAS SUPERLATTICES

被引：70

作者：

HIRAYAMA, Y

SUZUKI, Y

OKAMOTO, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1985年 / 24卷 / 11期

关键词：

D O I：

10.1143/JJAP.24.1498

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1498 / 1502

页数：5

共 21 条

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