INTERDIFFUSION OF AL AND GA IN SI-IMPLANTED GAAS-ALAS SUPERLATTICES

被引:34
作者
HIRAYAMA, Y
HORIKOSHI, Y
OKAMOTO, H
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 12期
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D O I
10.1143/JJAP.23.1568
中图分类号
O59 [应用物理学];
学科分类号
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页码:1568 / 1572
页数:5
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