CHARACTERIZATION OF IMPLANTED AND ANNEALED VAPOR-PHASE EPITAXIAL GAAS

被引:15
作者
BHATTACHARYA, PK [1 ]
RHEE, JK [1 ]
OWEN, SJT [1 ]
YU, JG [1 ]
SMITH, KK [1 ]
KOYAMA, RY [1 ]
机构
[1] TEKTRONIX INC,BEAVERTON,OR 97077
关键词
D O I
10.1063/1.328707
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:7224 / 7231
页数:8
相关论文
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