EVIDENCE OF TRAPPING IN DEVICE-QUALITY LIQUID-PHASE-EPITAXIAL IN1-XGAXASYP1-Y

被引:22
作者
BHATTACHARYA, PK [1 ]
KU, JW [1 ]
OWEN, SJT [1 ]
CHIAO, SH [1 ]
YEATS, R [1 ]
机构
[1] VARIAN ASSOCIATES,CORP SOLID STATE LAB,PALO ALTO,CA 94303
关键词
Electron traps; Gallium compounds; Indium compounds; Semiconductor epitaxial layers;
D O I
10.1049/el:19790538
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Traps have been identified in epitaxial n- and p-type In1 − xGaxAsyP1 − y for the first time. The activation energy, capture cross-section and density of several electron traps in the quaternary composition range from InP to In0.53Ga0.47As have been determined. An electron trap similar in some characteristics to the 0.83 eV electron trap present dominantly in bulk and v.p.e. GaAs was observed in an n-type In0.71Ga0.29As0.45P0.55(Eg = 0.95 eV) layer. Hole traps were not observed. © 1979, The Institution of Electrical Engineers. All rights reserved.
引用
收藏
页码:753 / 755
页数:3
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